In this paper Ag/SiOx nanocomposites are fabricated by inductively coupled plasma (ICP) assisted magnetron sputtering technology. During the deposition of matrix the monomer hexamethyldisiloxane (HMDSO) was flowed into the chamber for SiOx deposition; Ar ions generated in plasma sputtered target to emit Ag nanoparticles. The role of processing parameters, ICP power and the deposition time, on the microstructures and properties of nanocomposites was then investigated in this work. Through FTIR, UV–Visible chemical structures of the nanocomposite Ag/SiOx were characterized; the Ag status in the surface was analyzed by XPS; the morphology of the matrix was detected by AFM and SEM; and the Ag particle size and crystalline were measured by HRTEM and XRD, respectively. As an application the antibacterial behavior of Ag/SiOx nanocomposites was also examined in this paper.