In this work, an orthogonal optical grating structure is demonstrated as a displacement sensing element. The grating is made with gradient periodicity and height on both sides of a polydimethylsiloxane (PDMS) substrate using an oxygen plasma treatment of prebent PDMS. Based on Fraunhofer diffraction effect, it is experimentally shown that any displacement can be quantitatively characterized in both the x and y directions with an estimated maximum error value of 0.4% and a resolution of 300 μm− 1. With this simple and low cost technology, it is proved that this structure can operate as a single element sensor for vectorial displacement signals, which can be applied for vectorial displacement measurement and multi-axis integrated displacement sensors.

影响因子
1.806
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作者

Hao Guo,Jun Tang,Kun Qian,Miaomiao Zhao,Jiangtao Yang,Wei Zhang,Binzhen Zhang,Jun Liu,Chenyang Xue,Wendong Zhang.

期刊

Microelectronic Engineering,157,24-30(2016)

年份