ZnO thin films with various Nd doping levels (0%, 1%, 3% and 5%, respectively) have been synthesized by the solel method on glass substrates. X-ray diffraction (XRD) spectra and atom force microscope (AFM) studies reveal that all samples possess hexagonal wurtzite structure without any second phase. 1% Nd doped ZnO thin film has the best crystalline quality. With Nd concentration increases, the grain size reduces gradually. The optical measurements show that with Nd concentration increases, the absorption peak shifts to short wavelength, which indicates that the optical band gap of Nd-doped ZnO thin films increases. All samples have ultraviolet emission centered at 377nm and strong green emission at 511nm. The intensity of green emission gradually increases with Nd concentration increases. The emission mechanism is discussed in detail.